SEM / TMAFM images on Nanolithography and Nanostructures

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P. Daniel Dapkus
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(SEM) "Tough stuff" : Copolymer microphase separation can be observed on rough / irregular surfaces as long as the surface irregularity is in the length scale much longer than the periodicity of the pattern (~40nm).
(SEM) Hole array transferred into GaAs (100) surface using wet chemical etching.
(SEM) Hole array transferred into GaAs (311)B surface using wet chemical etching.
(SEM) InAs nanostructures examined using Hitachi 4700. Coalescence of adjacent nanostructures due to coalescence of neighboring holes is clearly shown. Crystal facets are resolved as well.
(TMAFM) Typical GaAs nanostructures by selective area growth.
(TMAFM) Uniform InAs nanostructures selectively grown under optimized MOCVD growth condition.
 
(TMAFM) GaN nanostructure array selectively grown on GaN buffer.
(TMAFM) InGaN nanostructures selectively grown on GaN buffer surface.
 

 


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