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Microdisk Resonant Devices


Photo gallery

See a collection of SEM photos of smooth and vertical disk and ring mesas defined with the newly developed CH4 -based RIE dry etching process.

                                                            

A microdisk resonant cavity supports whispering gallery modes, which propagate by means of total internal reflection from the disk/air interface. The first order mode has the smallest volume and occupies the outmost region of the disk in the radial direction. The resonant condition is achieved when the roundtrip phase is equal to integer number times 2p: 2pR*beff=p*2p. The following picture shows a cross-sectional view of a microdisk cavity and the field distribution of the first TE mode as calculated by a full-vectorial mode solver.

When coupled to bus waveguides, a microdisk cavity is

 

capable of completely extracting the resonant wavelength from the input port and rerouting it to the output, drop port. Thus numerous applications could be utilized and the microdisk device is viewed as building block for the future photonic circuits. 

  Process flow- chart

The vertically coupled microdisk resonators are processed by a thermal wafer -to-wafer bonding. Follow the link to find out more how the devices are made.

A  presentation

The microdisk devices are versatile elements for the photonic circuits.  This presentation (best viewed with IE 4 or latter) contains more information on this subject. A PDF version is also available.


  A movie from FE simulation

To understand the tradeoffs governing the behavior of this complex device extensive numerical simulations are undertaken. The above movie is an example of a 3D Finite Element simulation.

  List of related publications

This page contains a list of publications related to the project. 

  Group Members participating in the research

  1. Zhen Peng

  2. Qi Yang

  3. Hyung-Joon Chu

 Recent results !!!

 


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