Facilities for Device Processing
The W. M. Keck Photonic Research Lab is part of the Center for Photonic
Technology group, consisting of fifteen faculty members and many student
researchers. The focus is research and development of Photonic Materials,
Devices, and Systems. The W. M. Keck Photonic Research Laboratory
cleanroom is
a 5000 square foot state of the art research facility devoted to enabling
the fabrication of photonic, electronic, and micro-mechanical devices in
compound and elemental semiconductors, polymersand, and other photonic
materials. The main research space is for class 100 operation with a class
10 photolithography area. The facility is equipped with state of the art
research tools for two-sided contact lithography, E-beam lithography,
electron cyclotron reactive dry etching of semiconductors and insulation,
E-beam metal deposition, E-beam and PECVD dielectric deposition, rapid
thermal processing, oxidation diffusion and metrology.
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